| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping film which prevents nonuniform machining of a workpiece due to oscillation of the same. SOLUTION: The lapping film 11 is provided for machining a surface of the workpiece to which rotary motion and oscillation are imparted, by being pressed onto the workpiece by a shoe, and consists of a thin substrate which is unshrinkable and deformable, and abrasive grains 80 arranged on one substrate surface which is to be pressed onto the workpiece. The abrasive grains are arranged more densely at both lateral ends of the substrate than at a central portion of the same. Since the density of the grains 80 is made different and specifically set so as to be higher at both the lateral ends of the film, even if the grains 80 are more worn at both the film ends by corners of the workpiece, the workpiece is uniformly machined, to thereby enhance the straightness of the same. COPYRIGHT: (C)2004,JPO&NCIPI |
