METHOD OF PRODUCING THIN FILM OR POWDER ARRAY USING LIQUID SOURCE MISTED CHEMICAL DEPOSITION PROCESS USING REACTION AND DIFFUSION BETWEEN LIQUID AND LIQUID

摘要

PURPOSE: A method of producing a thin film or a powder array using a liquid source misted chemical deposition process is provided to form the thin film or the power array having an uniform phase by using a liquid mixing method at the room temperature. CONSTITUTION: Two or more metal precursor solutions are fabricated by resolving a metal precursor into a solvent. A liquid source is generated by applying a high frequency to the solution selected from the metal precursor solutions within a reactor. The liquid source is transferred to a vacuum chamber under the constant pressure. The liquid source is deposited on each region of a substrate by using a folding screen or a shifting mask. A thin film or a powder array is fabricated by performing a thermal process. The fabrication processes are performed by using the remaining solution.