| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for supplying an alkaline developing solution, in which a deterioration state of an alkaline developing solution can be reliably evaluated, dimensional accuracy of a resist pattern can be maintained fully and deterioration in cost benefit can be prevented. SOLUTION: The developing solution supplying apparatus 100 is equipped with a control tank 5 and an equalizing tank 6, connected in the post stage of a receiving tank 1 connected to a developing apparatus 210 via a pipe L1. A liquid supply system 8 and a control device 9 are connected to the control tank 5, and the concentrations of chemical species derived from carbonic acid gas and of an alkaline component in a used liquid W are controlled to specified control values, based on the measurements by densitometers 51, 52. The obtained regenerated liquid is supplied to the developing apparatus 210 through a pipe L2. COPYRIGHT: (C)2005,JPO&NCIPI |
