发明名称 ANODIZING SYSTEM, ANODIZING METHOD, AND DISPLAY PANEL
摘要 PROBLEM TO BE SOLVED: To process a substrate of larger size using components of smaller size in an anodizing system, an anodizing method and a display panel being manufactured by these system and method. SOLUTION: The anodizing system comprises a lamp radiating light, a stage located at a reachable position of the radiated light and capable of mounting a substrate to be processed while directing the part to be processed upward, a processing tank having a frame being located above the stage, a cathode electrode provided in the way of passage of the radiated light to the substrate to be processed and having an opening for passing the light, a sealing member for establishing liquid seal between the frame and the mounted substrate to be processed, a conductive contact member provided to touch the electrode pattern of the substrate to be processed on the annular outside of the sealing member and moving along the side of the substrate to be processed, and a current source connected electrically with the contact member and setting an output current value depending on the number of electrode patterns of a touching substrate to be processed as the contact member moves. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005072059(A) 申请公布日期 2005.03.17
申请号 JP20030209091 申请日期 2003.08.27
申请人 TOKYO ELECTRON LTD;MATSUSHITA ELECTRIC WORKS LTD 发明人 YAGI YASUSHI;USHIJIMA MITSURU;WATABE YOSHIFUMI;KOMODA TAKUYA;AIZAWA KOICHI
分类号 H01L21/3063;C25D5/00;C25D11/02;C25D11/32;C25D17/00;C25F3/12;C25F3/14;C25F7/00;H01J31/15;H01L21/02;H01L21/316;(IPC1-7):H01L21/306 主分类号 H01L21/3063
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