MACHINE FOR TRANSFERRING WAFER

摘要

A wafer transfer apparatus is provided to transfer safely a wafer to semiconductor fabrication equipment by preventing the breaking of the wafer. An arm(14) is used for loading a wafer to or unloading the wafer from a wafer cassette(12). An arm driving unit(16) drives the arm. A collision prevention unit(18) is installed at the arm in order to sense an obstacle in front of the arm and prevent collision between the arm and the obstacle. The collision prevention unit includes a sensor(18a) installed at the arm and a controller(18c) for controlling the arm driving unit according to an output signal of the sensor. An amplifier(18b) is used for amplifying the output signal of the sensor and transmitting the amplified signal to the controller.