FILM BULK ACOUSTIC RESONATOR AND A MANUFACTURING METHOD THEREOF

摘要

A film bulk acoustic resonator and a method for manufacturing the same are provided to realize the micromachining by forming the protection structure to protect the device function unit of the FBAR(film bulk acoustic resonator) device. A film bulk acoustic resonator includes a substrate(221), a device function unit, a plurality of external electrodes(224) and a cap(225). The substrate(221) has a preset size. The device function unit is formed with providing a preset air gap on the central portion of the substrate(221) to perform the resonance function corresponding to the electrical signal. The plurality of external electrodes(224) are formed on the top of the substrate and adjacent to the edge of the substrate. The electrodes(224) are electrically connected to the device function unit. The cap(225) is provided with a side wall encompassing the device function unit and a roof covering the top of the sidewall.