发明名称 OPTICAL ELEMENT AND EXPOSURE DEVICE HAVING THE OPTICAL ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide an optical element which is operated as a diffraction grating and can freely change the diffraction angle of the diffracted rays. SOLUTION: The optical element 10 is provided with a substrate side electrode 12 formed on a substrate 11, a plurality of bridge members 13 being arranged in parallel over the substrate side electrode 12 and a power supply 15 which applies voltages to bridge side electrodes 14 formed on the bridge members 13 and the substrate side electrode 12. The bridge side electrodes 14 are formed on all of the plurality of bridge members 13 and electric circuits 16, which are formed by connecting the substrate side electrode 12 and the bridge side electrodes 14 to the power supply 15, are made into parallel circuits. On-off switches 17 which are used to open and close the parallel circuits and polarity switching switches 18, which are used to switch polarities of the bridge side electrodes 14, are respectively arranged for every one of the parallel circuits. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005250355(A) 申请公布日期 2005.09.15
申请号 JP20040064119 申请日期 2004.03.08
申请人 SHARP CORP 发明人 YOSHIDA AKIRA;SEKIMOTO YOSHIHIRO;UEDA MINORU
分类号 G02B26/08;G02B5/18;G03F7/20;H01L21/027;(IPC1-7):G02B26/08 主分类号 G02B26/08
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