| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck provided with uniform adsorption force and high desorption responsiveness, and to provide a method for manufacturing the electrostatic chuck. SOLUTION: The electrostatic chuck comprises a dielectric layer formed by aluminum nitride sintered compacts of which the volume resistivity at an application temperature is≥1×10<SP>8</SP>Ωcm and≤1×10<SP>13</SP>Ωcm, the grain boundary volume resistivity is≤1/10<SP>2</SP>of transgranular volume resistivity, and the impurity is≤3 atom% and a face-like electrode formed on one surface of the dielectric layer. The method for manufacturing the electrostatic chuck comprises a process for forming aluminum nitride mixed power by adding 0.1 to 10 wt% of impurity including samarium oxide or europium oxide to aluminum nitride material powder whose purity is≥99.9%, a process for forming a compact in which an electrode is buried by using the aluminum nitride mixed powder, and a process for baking the compacts at maximum temperature of≥1,720°C and≤1,870°C by using a hot press method. COPYRIGHT: (C)2006,JPO&NCIPI |
