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发明名称
摘要
申请公布号	KR100536178(B1)	申请公布日期	2005.12.12
申请号	KR20017008107	申请日期	2001.06.23
申请人		发明人
分类号	C01B33/12;B01J19/00;C01B37/02;H01L21/316	主分类号	C01B33/12
代理机构		代理人
主权项
地址

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