| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum container where vibration is less likely to be transmitted to a housed device. SOLUTION: A diaphragm mechanism 15 is provided between a first part 9a and a second part 9b to communicate the first part 9a and the second part 9b through the diaphragm mechanism 15. Thus, a reticle chamber 5, a wafer chamber 7 and a highly vacuum container 8 can be separated from a chamber 9, and the pressure difference between the first part 9a and the second part 9b can be kept by the diaphragm mechanism 15. Since the reticle chamber 5, the wafer chamber 7 and the highly vacuum container 8 are connected to the chamber 9 only through a seismic isolation stand 11, the vibration of a turbo molecular pump 12, a dry pump 13 and a dry pump 14 is less likely to be transmitted. COPYRIGHT: (C)2006,JPO&NCIPI |
