ANGULAR VELOCITY SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR

摘要

An angular velocity sensor element includes a fixed section, an extending section having an end coupled to the fixed section and extending in a direction of a first axis, a first drive vibrator coupled to the extending section and extending in a direction of a second axis perpendicular to the first axis, a first detection vibrator coupled to the first drive vibrator and extending in the direction of the first axis, and a second detection vibrator coupled to first detection vibrator and extending in the direction of the second axis. In the angular velocity sensor element, the first drive vibrator is driven to perform a flexural vibration in a direction of a third axis perpendicular to the first and second axes, and the first detection vibrator detects an angular velocity around the first axis, and the second detection vibrator detects an angular velocity around the second axis.

主权项

1. An angular velocity sensor element comprising:
a base section; an extending section including an end coupled to the base section, and extending in a direction of a first axis; a first beam coupled to the extending section, extending in a direction of a second axis crossing the first axis, and provided with a first electrode; a first arm section coupled to the first beam, extending in the direction of the first axis, and provided with a second electrode; and a second arm section coupled to the first arm section, extending in the direction of the second axis, and provided with a third electrode.