,申请号JP19690015212-传众专利搜索

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发明名称
摘要
申请公布号	JPS497630(B1)	申请公布日期	1974.02.21
申请号	JP19690015212	申请日期	1969.02.26
申请人		发明人
分类号	H01L21/60;C23C18/16;C23C18/34;C23C18/36;C23C18/52;H01L21/28	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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