| 摘要 |
PROBLEM TO BE SOLVED: To provide precursors and methods of forming films.SOLUTION: There is provided a precursor having Formula I defined by XRHSi(NRR), where X is selected from Cl, Br and I; Ris selected from a linear or branched C-Calkyl group, a C-Calkenyl group, a C-Calkynyl group, a C-Ccyclic alkyl, and a C-Caryl group; Ris selected from a linear or branched C-Calkyl, a C-Calkenyl group, a C-Calkynyl group, a C-Ccyclic alkyl group, and a C-Caryl group; Ris selected from a branched C-Calkyl group, a C-Calkenyl group, a C-Calkynyl group, a C-Ccyclic alkyl group, and a C-Caryl group; m is 1 or 2; n is 0, 1 or 2; p is 0, 1 or 2; and m+n+p is less than 4; provided that Rand Rare linked to form a ring or not linked to form a ring.SELECTED DRAWING: None |
