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发明名称
EKISHOHYOJISOSHI
摘要
申请公布号
JPS5178698(A)
申请公布日期
1976.07.08
申请号
JP19750002513
申请日期
1974.12.28
申请人
CANON KK
发明人
OOKUBO YUKITOSHI
分类号
G01R19/165;G02F1/13;G02F1/1345;G02F1/136;G02F1/1365;G09F9/00;G09F9/30;G09F9/35;H01L49/02
主分类号
G01R19/165
代理机构
代理人
主权项
地址
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