| 发明名称 |
METHOD OF COATING CORROSION RESISTANT SUBSTANCE ON HEATING MATERIAL |
| 摘要 |
PURPOSE:A method of coating corrosin resistant substances such as TiC,TiN, etc. on heating materials such as a heater for evaporation source for vacuum evaporation, etc. without changing properties of the base materials. |
| 申请公布号 |
JPS5245592(A) |
申请公布日期 |
1977.04.11 |
| 申请号 |
JP19750093764 |
申请日期 |
1975.07.31 |
| 申请人 |
SHINKOU SEIKI KK |
发明人 |
KAWASHITA YASUSHI;NAKASONE MASAMI;SUZUKI AKIRA;SAKAI KATSUHIRO |
| 分类号 |
C23C14/06;C23C14/00;C23C14/08;C23C14/26;C23C14/32 |
主分类号 |
C23C14/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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