PROBE CARD FOR A TESTING APPARATUS OF ELECTRONIC DEVICES, PARTICULARLY FOR EXTREME TEMPERATURE APPLICATIONS

摘要

A probe card for a testing apparatus of electronic devices comprises at least one testing head which houses a plurality of contact probes, each contact probe having at least one contact tip suitable to abut onto contact pads of a device under test, and a support plate of the testing head associated with a stiffener and an intermediate support, connected to the support plate and suitable to provide a spatial transformation of the distances between contact pads made on opposite sides thereof. Conveniently, the probe card comprises a support which is joined to the intermediate support, which is made of a material compatible with the printed circuit board technologies and has a coefficient of thermal expansion greater than 10×10−6° C.−1, the support being made of a metal material having a coefficient of thermal expansion lower than 6×10−6° C.−1.

主权项

1. A probe card for a testing apparatus of electronic devices, comprising:
at least one testing head which houses a plurality of contact probes, each contact probe having at least one contact tip adapted to abut onto a respective contact pad of a plurality of contact pads of a device under test, a support plate configured to support the testing head a stiffener associated with the support plate, an intermediate support, connected to the support plate and adapted to provide a spatial transformation of distances between contact pads on opposite faces of the intermediate support, and a support joined with the intermediate support, the intermediate support being made of a material compatible with technologies for printed circuits and having a thermal expansion coefficient greater than 10×10−6° C.−1 and the support being made of a metallic material having a thermal expansion coefficient smaller than 6×10−6° C.−1.