Composite substrates of silicon and ceramic

摘要

Composite substrates include a single crystal silicon layer disposed on a ceramic layer, including a transparent glass layer. Combination of single crystal devices and non-single crystal devices can be fabricated on a ceramic substrate.

主权项

1. A method to form a composite substrate, the method comprising
providing a substrate, wherein the substrate comprises silicon; ion implanting a species under a surface of the substrate; applying a layer of ceramic paste on the surface of the substrate; drying the layer of ceramic paste; heating the ion implanted substrate at a first temperature while a force is applied to hold the substrate against the layer of dried ceramic paste, wherein the force is distributed throughout the surface, wherein the first temperature is operable to exfoliate a layer from the substrate to bond to the layer of dried ceramic paste; sintering the layer of dried ceramic paste at a second temperature.