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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPS56158873(A)
申请公布日期
1981.12.07
申请号
JP19800062815
申请日期
1980.05.14
申请人
HITACHI LTD
发明人
KOMATSU HIDEO;IIDA SHINYA;MIZUTANI TATSUMI;UEKI KAZUYOSHI
分类号
H01L21/302;C23F4/00;H01L21/3065;H01L21/311;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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