| 摘要 |
PURPOSE:To eliminate the defective short-circuit of an electrode at the groove bottom part and to increase the yield, by having a cross at an angle except right angles between the outside line of a photoresist which protects the groove bottom part of a tuning fork type crystal oscillation bar and the ridgeline of the inside surface of a tuning fork branch. CONSTITUTION:A groove bottom part 3 is covered with a photoresist 8 from the upper and lower directions in order to divide the electrode of a tuning fork type crystal oscillation bar at the area near the bottom 3. In this case, a cross is obtained at an angle except right angles between the outside line 8a of the resist 8 and the idgeline 2 of the inside surface of a tuning fork branch 2. Thus the stress is dispersed even through the resist 8 has shrinkage during working at a high temp. like baking, vapor deposition or the like process. As a result, no crack is produced for the resist 8 at the cross part. |
