| 摘要 |
PURPOSE:To analyze depth of a sample not influenced with a shape effect by providing a regional designation circuit. CONSTITUTION:An ion generating unit 8 for irradiating a primary ion beam 5 to a sample 1, mass spectrograph 7 for analyzing the mass of a secondary ion 6 generated from the sample, etc. are provided, to two-dimensionally scan the beam 5 in a fixed region on a surface of the sample, saw tooth signals in horizontal and vertical directions are fed to electrostatic deflection electrodes 10X, 10Y by a scanning power source 12, and a detection signal output of the spectrograph 7 is applied as a brightness modulation signal of a cathode-ray tube (CRT)11 synchronized with the power source 12, if the sample is scanned by the beam 5 under a condition analyzed mass by the spectrograph 7 is fixed to a specific value, a sample scanning brightness modulated image on the basis of a specific ion is displayed on a screen of the CRT11. An output of a regional designation circuit 73, which outputs a signal on the basis of comparison between an output of the source 12 and a variable reference signal, is applied to a recorder 14 and correspondingly recorded to an output of the spectrograph 7. |
