| 摘要 |
PURPOSE:To improve mass productivity, by forming a pendulum part having a hinge by using a film forming method such as vacuum evaporation, sputtering, ion plating, and vapor growth. CONSTITUTION:An electrode metal film is formed on an outer shell 20. Then a film 60 made of a fusible material such as aluminum is formed. An electrode metal film is further formed on said fusible film 60. Silicon dioxide which is to become the pendulum and the hinge is deposited on said film to the thickness of the hinge. Then the hinge part is masked and silicon dioxide is deposited again, and a pendulum part 72 and an outer shell part 73 which supports the hinge are formed. Thereafter the masking is removed, and an electrode metal film 54 is formed through a conductive path from the surface of the silicon dioxide 72 at the pendulum part and hinge to a groove 23. In this state, the fusible film 60 is eluted by chemical etching, and the cantilever shaped pendulum connected to the outer shell 20 is obtained. |
