| 摘要 |
PURPOSE:To effect a plasma treatment of large resin parts of complicated shapes simultaneously and uniformly, by distributing microwaves generated in a magnetron into a plurality of branches, generating a plasma in each of the branches and feeding each plasma to a treatment vessel. CONSTITUTION:A plurality of large resin parts of complicated shapes are placed in a treatment vessel 1, the pressure in the vessel 1 is reduced to a predetermined vacuum by evacuation through discharge ports 19a and b, 20a and b, and 21a and b, and the treatment gas is fed to the vessel 1 through generating tubes 9a and b. Microwaves generated in a magnetron placed in an oscillator 2 are bifurcated by means of a distributor 3 and transmitted to generating furnaces 8a and b through isolators 4a and b, power monitor detectors 5a and b, matching devices 6a and b, and waveguides 7a and b to convert the treatment gas streams flowing through generating furnaces 9a and b into plasmas. These microwave discharge plasmas are led to the vessel 1 through inlets 13a and b, 22a and b, and 23a and b, and shower-diffused by means of shower pipes 14-16a and b. |
