Real time diagnostics for flow controller systems and methods

摘要

A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller system and the flow measurement system in real time.

主权项

1. A system, comprising:
a flow device comprising:
a flow path connected to one or more sensors configured to generate one or more signals based on a flow of material past the one or more sensors;a control valve configured to change the flow of the material based on the signals from the one or more sensors;a mass flow controller configured to receive a flow rate;the mass flow controller configured to control the control valve to output the material at the flow rate;the mass flow controller configured to output an actual flow rate and an indicated flow rate based on the signals from the one or more sensors;the mass flow controller further comprising:
a primary sensor,a secondary sensor,an alternate sensor,an outside sensor located outside the flow device to measure the flow of material received from the flow device; andthe mass flow controller configured to compare the signal from the outside sensor with the signal from the primary or secondary or alternate sensor to determine that at least one of the primary, secondary or alternate sensor is malfunctioning.