| 摘要 |
PURPOSE:To make a device compact and inexpensive and to improve the yield by connecting through holes, which are opened in end parts of capillary column grooves adjacent to each other, to each other through a connection hole. CONSTITUTION:Through holes 5 and 5' provided in silicon wafers 2 and 2' of plate-shaped capillary columns 1 and 1' are connected to each other by a connection pipe 6. End parts 8 and 8' of this connection pipe 6 are adhered to surfaces in sides, where capillary column grooves 4 and 4' are not provided, of silicon wavers 2 and 2'. Through holes 5 and 5' are formed with sectional areas approximately equal to those of column grooves 4 and 4', and a hole 7 of the connection pipe 6 is formed with a sectional area approximately equal to those of through holes 5 and 5'. Thus, gas separated by the column 1 passes the column groove 4, the through hols 5, the hole of the connection pipe 6, and the through hole 5' of the column 1' while keeping the separated state and is charged to the column groove 4', and the separation of the column 1 is developed furthermore to raise the separability. |
