ION MILLING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent reattachment of spatter particles to specimen, and obtain a clean processed surface.SOLUTION: A spatter particle adhesion member 109 for adhering spatter particles generated by ion beam irradiation, is arranged in the vicinity of the ion beam irradiation region of a specimen 101 mounted on a specimen support 107 so as not to prevent irradiation of an ion beam 103. The spatter particle adhesion member is controlled so as to be lower than the ion beam irradiation region.SELECTED DRAWING: Figure 1