| 摘要 |
PURPOSE:To protect a semiconductor pellet completely and stably from effects of alpha rays, by forming a frame part on the upper surface of the semiconductor pellet. CONSTITUTION:A semiconductor pellet 2 is equipped with a square frame part 8 which is fixed on the periphery of an active area 2a and inside a bonding pad 10. This frame unit is formed by making evaporation of polysilicon in a wafer process and etching it in a desirable shape. Then, when the center area of the active area 2a is potting-coated with a coating agent of polyimide resin and heated at a prescribed temperature for curing, an alpha ray-preventive film 9 made of polyimide resin can be formed. Thus, the frame part 8 functioning as a dam can prevent the coating agent from overflowing widely and becoming small in thickness. Hence, a semiconductor pellet with complete and stable alpha rays-resisting performance can be obtained. |
