| 摘要 |
PURPOSE:To reduce uselessness of gas laser media and to start laser operation faster and more economically than a conventional method, by using the gas laser medium, which is used to make the inside of a gas laser oscillator to be in the vicinity of an atmospheric pressure, for laser oscilaltion. CONSTITUTION:Gas laser media in gas-laser-medium supply sources 4-6 are made to be He, N2 and CO2, respectively. The composition ratio thereof is made to be He:N2:CO2=63:31:6. The pressure of the gas laser media at the time of operation for laser oscillation is made to be 100 torr. When the operation is finished, a solenoid valve 8 is opened by a control device 11, and N$2*, whose cost is low among three kinds of the gas laser media, is supplied from the gas-laser-medium supplying source 5 until the inside of a device becomes an atmospheric pressure. when the operation is started again, a solenoid valve 3 is opened, and a vacuum pump 2 is operated. The inside of a gas laser oscillator 1 is evacuated until 34.1 torr, which is higher than the partial pressure of 31 torr of nitrogen gas and in the vicinity of this value',is reached. Then, at first, He is supplied until 94.3 torr is obtained. Then CO2 is supplied. When the pressure indication on a detector 10 reaches 100 torr, a solenoid valve 9 is closed by the control device 11, and the supplying operation is finished. |
