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发明名称
PHOTOELECTRON BEAM TRANSFER
摘要
申请公布号
JPS635561(A)
申请公布日期
1988.01.11
申请号
JP19860149029
申请日期
1986.06.25
申请人
FUJITSU LTD
发明人
YAMADA AKIO;SAKAMOTO JUICHI;KUDO JINKO;YASUDA HIROSHI
分类号
H01L27/14;G03F7/20;H01L21/027
主分类号
H01L27/14
代理机构
代理人
主权项
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