| 摘要 |
PURPOSE:To save labor in process control by jointing a printed circuit board accommodation rack with the accommodation chamber of a semiconductor manufacturing device, and furnishing a memory for such data of printed circuit board accommodated in the rack as nature, accommodation position, etc. CONSTITUTION:A cassette library 2 is movable with possibility of fixing by the use of a locking member 15 furnished on the overall air-conditioner chamber side 2 and a roller 2a installed on the library side 2. The library 2 is equipped with a memory 21 to store such parameters necessary for operation of the device, as the name and accommodation position of reticles in cassette 4 accommodated in said library, and initially set items about the relevant reticles, and it is possible to feed parameters in the stepper body console by coupling with the chamber 1. |
