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发明名称
ELECTRON BEAM DEVICE
摘要
申请公布号
JPS6378447(A)
申请公布日期
1988.04.08
申请号
JP19860220852
申请日期
1986.09.20
申请人
FUJITSU LTD
发明人
OZAKI KAZUYUKI;ITO AKIO;OKUBO KAZUO;ISHIZUKA TOSHIHIRO
分类号
H01L21/66;G01R31/26;G01R31/302;H01J37/22;H01J37/28
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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