| 摘要 |
PURPOSE:To manufacture a fine circuit by using a simple means whose cost of installation is low by a method wherein a ceramic thin film capable of becoming a superconductor is formed on a substrate and this thin film is irradiated with an electron beam or a laser. CONSTITUTION:A ceramic thin layer 2 is formed on a substrate 1 composed of an insulator such as a ceramic or the like in such a way that a pasty ceramic capable of becoming a superconductor is coated, sputtered or the like. Then, a part to be used as a circuit in the thin layer 2 is irradiated with an ion beam according to a need; a very small quantity of composition in the part to be used as the circuit is adjusted. Then, the part to be used as the circuit is irradiated with an electron beam 3 or a laser; the part to be used as the circuit is baked; a fine circuit 4 composed of the superconductor is formed. Accordingly, when a position to be irradiated with the electron beam 3 or the ion beam and a heating temperature are controlled by using a computer, the arbitrary circuit can be formed; the structure thus formed is simple and a cost of installation is low. |
