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经营范围
发明名称
Plasma operation apparatus
摘要
申请公布号
US4876983(A)
申请公布日期
1989.10.31
申请号
US19880145371
申请日期
1988.01.19
申请人
HITACHI, LTD.;HITACHI SERVCE ENGINEERING CO LTD
发明人
FUKUDA, TAKUYA;MOCHIZUKI, YASUHIRO;MOMMA, NAOHIRO;TAKAHASHI, SHIGERU;SUZUKI, NOBORU;SONOBE, TADASI;CHIBA, KIYOSI;SUZUKI, KAZUO
分类号
C23C16/511;H01J37/32
主分类号
C23C16/511
代理机构
代理人
主权项
地址
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