| 摘要 |
A piezoelectric device that includes a piezoelectric film, which is formed by a sputtering method and which has a columnar structure, and electrodes disposed in contact with the piezoelectric film. The piezoelectric film has a composition containing an element which can substitute Nb and has an oxidation number of 2 or more and less than 5 when oxidized in a proportion of 3.3 mol or less relative to 100 mol of potassium sodium niobate represented by a general formula (K1-xNax)NbO3, where 0<x<1. |
