| 摘要 |
PURPOSE:To exchange a dirty optical element in a short time while a hermetic sealing is maintained by a method wherein a clean optical element is mounted on the opposite side to the dirty element positioned at the transmitting opening of a gas laser, a spherical or cylindrical holding part is rotated and after gas is evacuated, the holding part is further rotated. CONSTITUTION:In order to exchange a dirty optical element 3 positioned at a transmitting opening 13 of a gas laser, adjusting screws 8 are removed, damage preventive bodies 9 and a clean optical element 3 are put in grooves 16 for holding use and press members 4 are fixed on a spherical holding part 1 by fixing screws 5 using screw holes 14 in such a way that the members 4 are respectively pinched between O-rings 6 and 7. After that, the part 1 is rotated by a handle 19 for rotation use at 90 degrees and gas in a part mounted with the dirty element 3 is evacuated through exhaust vents 10. After the evacuation, the part 1 is further rotated by the handle 19 at 90 degrees in the same direction as the above rotated direction. As this result, the position of the dirty element 3 is replaced with that of the clean element 3 and the dirty element 3 can be removed. |
