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发明名称
METHOD AND APPARATUS FOR MANUFACTURE OF AMORPHOUS SEMICONDUCTOR ALLOY FILM
摘要
申请公布号
JPH0487324(A)
申请公布日期
1992.03.19
申请号
JP19900201541
申请日期
1990.07.31
申请人
TONEN CORP
发明人
OKAYASU YOSHINORI;ISHIMURA TAKESHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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