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发明名称
METHOD FOR SELECTIVE CRYSTAL GROWTH
摘要
申请公布号
JPH04175293(A)
申请公布日期
1992.06.23
申请号
JP19900304973
申请日期
1990.11.09
申请人
CANON INC
发明人
KAWASAKI HIDEJI;TOKUNAGA HIROYUKI
分类号
C30B25/04;C30B29/40;H01L21/205
主分类号
C30B25/04
代理机构
代理人
主权项
地址
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