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发明名称
METHOD FOR MEASURING ETCHING AMOUNT IN SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04179140(A)
申请公布日期
1992.06.25
申请号
JP19900302765
申请日期
1990.11.09
申请人
ASAHI KASEI MAIKURO SHISUTEMU KK
发明人
YAMADA TAKEHIRO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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