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发明名称	VACUUM GENERATING UNIT
摘要
申请公布号	JPH04194400(A)	申请公布日期	1992.07.14
申请号	JP19900324696	申请日期	1990.11.27
申请人	SMC CORP	发明人	NAGAI SHIGEKAZU;SAITO AKIO
分类号	F04F5/20;F04F5/44	主分类号	F04F5/20
代理机构		代理人
主权项
地址

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