| 摘要 |
<p>PURPOSE:To continue the regenerative action of a noble metal catalyst, and to continue the regenerative throughput capacity of a mixed gas for a prolonged time by bringing CO and O2 and NOx in the mixed gas used for a laser device into contact with the catalyst at a temperature, where the degree of poisoning by NOx is reduced, and recirculating these gases to the laser device. CONSTITUTION:A mixed gas used for a carbon dioxide gas laser device 7 is heated at a temperature of 200-350 deg.C by a gas heater 3, and catalytically reacted with a noble metal catalyst in a reactor 4. The heat of reaction generated is utilized for preheating an unreacted mixed gas. The mixed gas after the reaction is cooled by a gas cooler 5 up to a temperature capable of being used for laser oscillation, passed through a filter 6 to prevent dust, and returned to the laser device 7 again. Consequently, since the mixed gas is cooled to a temperature, where the degree of the adsorption of NOx is lowered, the regenerative action of the catalyst can be continued for a prolonged time. When the activity of the catalyst is reduced, NOx adsorbed to the catalyst is decomposed by an He-CO-O2 mixed gas.</p> |
