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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04330741(A)
申请公布日期
1992.11.18
申请号
JP19910014194
申请日期
1991.02.05
申请人
MATSUSHITA ELECTRON CORP
发明人
NAKAMURA AKIO
分类号
H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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