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发明名称
SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号
JPH0547785(A)
申请公布日期
1993.02.26
申请号
JP19910205894
申请日期
1991.08.16
申请人
SONY CORP
发明人
OTSU KOJI
分类号
H01L21/265;H01L21/28;H01L21/336;H01L29/78
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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