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发明名称
PLASMA BEAM DEFLECTING METHOD IN THIN FILM FORMING DEVICE
摘要
申请公布号
JPH05179432(A)
申请公布日期
1993.07.20
申请号
JP19920001458
申请日期
1992.01.08
申请人
CHUGAI RO CO LTD
发明人
KAMIIDE MASAO
分类号
C23C14/32;C23C16/48;C23C16/50
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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