METHOD FOR MANUFACTURING CYLINDRICAL TARGET AND POWDER SINTERING MOLD USED THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a cylindrical target, capable of preventing cleavages and cracks, etc., of the cylindrical target from occurring when cooled after sintering, and a powder sintering mold used therefor.SOLUTION: A powder sintering mold 101 manufactures a cylindrical target by: forming a sleeve 1 using carbon or ceramics; forming a pressing portion arranged at a position contacting at least the cylindrical target in the longitudinal direction of a core rod 3A using a material having a thermal expansion coefficient equal to that of the cylindrical target or more; and sintering a raw material powder 7a thrown into a ring-like space part 6 in a state pressed between the sleeve 1 and the pressed portion by a pressing member 5.SELECTED DRAWING: Figure 1