MOLD, IMPRINT METHOD, IMPRINT DEVICE, AND METHOD FOR PRODUCING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a mold having a plurality of pattern regions formed therein which can form a pattern without forming a gap of a resin between shot regions.SOLUTION: There is provided a mold which is a mold used in an imprint device for forming a pattern of an imprint material in a plurality of shot regions on a substrate, where a first peripheral region and a second peripheral region are formed in a first direction and a second direction where the plurality of pattern regions for forming the pattern are different from each other so that the peripheral regions are not adjacent to each other, and are formed on both ends in the first direction of the pattern regions so that patterns of an imprint material formed in an adjacent shot region with the second peripheral region of the pattern regions overlap patterns of the imprint material formed on the shot region with the first peripheral region of the pattern regions, when the patterns are formed in the plurality of shot regions in the first direction.SELECTED DRAWING: Figure 5