发明名称 |
AN IMAGING SYSTEM IN REFLECTION MODE USING COHERENT DIFFRACTION IMAGING METHODS AND USING MICRO-PINHOLE AND APERTURE SYSTEM |
摘要 |
A reflective sample, such as a mask, is imaged in an optics system. A radiation source emits a light beam with relatively low coherence. A first focusing element focuses the beam before a mirror reflects the focused beam towards the sample at an incidence angle of between 2 and 25° A pinhole aperture plate upstream of the sample has a first aperture to focus and cut-off the beam diameter to form a more monochromatic beam. The sample is displaced by a mechanism in a direction perpendicular to the normal vector of the sample surface while it reflects the light beam. The reflected beam passes a second aperture in the pinhole aperture plate next to the first aperture on its way to a pixel detector. The second aperture limits the diameter of the reflected beam, thereby adjusting the diameter of the light beam before it reaches the pixel detector. |
申请公布号 |
EP3108299(A1) |
申请公布日期 |
2016.12.28 |
申请号 |
EP20150703017 |
申请日期 |
2015.01.27 |
申请人 |
Paul Scherrer Institut |
发明人 |
EKINCI, Yasin;LEE, Sangsul |
分类号 |
G03F1/00;G03F1/84;G03F7/20 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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