| 摘要 |
Provided is a method for collecting an abrasive which can collect a high-purity abrasive in a simple manner from a collected slurry (22) including a spent abrasive. The method for collecting an abrasive according to the present invention is a method for preparing a recycled abrasive slurry including: polishing a material to be polished (3), which includes silicon as a main component, with an abrasive slurry including a plurality of kinds of additives added for different purposes; and preparing a recycled abrasive slurry from a collected abrasive slurry collected after the polishing, characterized in that the recycled abrasive slurry is prepared through: step 1 of removing, from the collected abrasive slurry, at least an additive B capable of decreasing a polishing rate among the plurality of additives, and step 2 of replenishing at least an additive A capable of increasing a polishing rate among the plurality of additives, to the abrasive slurry from which an additive has been removed, which has been prepared in step 1. |
