摘要 |
Provided is an X-ray fluorescence analysis method in which the quantity of a contained component other than the principal component in the sample is determined by using the result of a measurement of X-rays emitted from a sample whose principal component is an organic component, the method including the steps of: setting a quantitative value of the contained component based on a measured value of a fluorescent X-ray intensity; calculating an area occupancy ratio which represents the proportion of the X-rays falling onto the sample, based on a measured value of a scattered X-ray intensity and a theoretical value of the scattered X-ray intensity calculated on the assumption that the sample is composed of the principal component and that the entire amount of the cast X-rays fall onto the sample; recalculating the quantitative value of the contained component based on the measured value of the fluorescent X-ray intensity and a theoretical value of the fluorescent X-ray intensity calculated using the quantitative value of the contained component and the area occupancy ratio; recalculating the area occupancy ratio based on the result of a comparison of the measured value of the scattered X-ray intensity with a theoretical value of the scattered X-ray intensity calculated using the recalculated quantitative value of the contained component and the area occupancy ratio; and repeating the recalculation of the quantitative value of the contained component and the recalculation of the area occupancy ratio, and determining the quantitative value as the definite quantitative value of the contained component when the quantitative value satisfies a previously set convergence condition. |