发明名称 |
POLYMERIZABLE MONOMERS |
摘要 |
A monomer of formula (1) is provided wherein R 1 is hydrogen or a monovalent C 1 -C 6 hydrocarbon group, and R 2 is a group having polymerization functionality. Using the monomer, crosslinking units can be incorporated into a polymer chain. A chemically amplified negative resist composition comprising a base polymer having crosslinking units incorporated therein has a high sensitivity and forms a resist pattern with minimized LER. |
申请公布号 |
EP2413192(B1) |
申请公布日期 |
2016.12.21 |
申请号 |
EP20110175289 |
申请日期 |
2011.07.26 |
申请人 |
Shin-Etsu Chemical Co., Ltd. |
发明人 |
Domon, Daisuke;Watanabe, Satoshi |
分类号 |
G03F7/038;C07D239/10;C08F26/06;G03F1/00;G03F7/20 |
主分类号 |
G03F7/038 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|