| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for a decomposition treatment of a halogen-containing compound where the exchange of a decomposition agent whose decomposition performance is deteriorated can be properly performed.SOLUTION: A reaction zone 22 is formed at an upstream side along a flow direction of a gas 11 to be treated in a reaction cylinder 2 and an adsorption zone 23 is formed at a downstream side. The deterioration of the performance of a decomposing agent 12 in an upper stream side than an extraction portion 42 is detected by detecting a halogen gas which is the decomposition product of a halogen-containing compound due to the extraction of the gas 11 to be treated from an intermediate zone in the reaction zone 22 and then the exchange of the decomposing agent 12 whose decomposition performance is deteriorated is performed by filling a new decomposing agent 12 intermittently or continuously and at the same time discharging the decomposing agent 12 whose decomposition performance is deteriorated. |
