发明名称 感光性樹脂組成物、レジスト積層体及びそれらの硬化物
摘要 The purpose of the present invention is to provide the following: a photosensitive epoxy resin composition that, via photolithography, can form a high-resolution, low-stress image that has vertical side walls and resists moisture and heat, and/or a resist laminate using said photosensitive epoxy resin composition; and an article or articles obtained by curing said photosensitive epoxy resin composition and/or resist laminate. The present invention is a photosensitive resin composition containing the following: an epoxy resin (A), a polyhydric phenol compound (B) having a specific structure, a cationic-polymerization photoinitiator (C), a silane compound (D) containing an epoxy group, and a reactive epoxy monomer (E) having a specific structure. The epoxy resin (A) contains the phenol derivative represented by formula (1), an epoxy resin (a) obtained via a reaction with epihalohydrin, and an epoxy resin (b) that can be represented by formula (2). The reactive epoxy monomer (E) is a polycyclic saturated hydrocarbon derivative that has a plurality of epoxy groups.
申请公布号 JP6049076(B2) 申请公布日期 2016.12.21
申请号 JP20130089586 申请日期 2013.04.22
申请人 日本化薬株式会社 发明人 今泉 尚子;稲垣 真也;本田 那央
分类号 G03F7/038;C08G59/38;C08G59/62;C08G59/68;G03F7/004;H05K1/03 主分类号 G03F7/038
代理机构 代理人
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